Overview
EDAMate is an equipment interface solution that works as a homogeneous port for tools, data, monitoring and control functions.EDAMate is a connectivity solution based on the modular and Service-Oriented Architecture (SOA), which complies with EDA standards developed by SEMI. EDAMate also allows mass data acquisition for 300mm tools, also configurable and extensible to meet user needs for IC and equipment manufacturers.
 
 
Features
∙ Web service based on Service Oriented Architecture (SOA)
∙ Security management based on SSL
∙ High capacity data transfer using HTTP, SOAP/HTTPS
∙ Event-driven push (Fire and Forgot) style data collection
∙ On-demand (Request and Reply) data collection
∙ Performance tracking (CPU, memory, and disk usage)
∙ Multiple data consumer support
∙ Client session, client role and work history management
∙ Components for SAN interface
 
 
∙ Architecture