Overview
Equipment Engineering System (EES) helps maximizing productivity of semiconductor & FPD industry and enables engineers to analyze and monitor the status of yield improvement & equipment efficiency.The increase in Overall Equipment Effectiveness (OEE) ultimately leads to quality improvement. EES, also known as EEC (Equipment Engineering Capability), is applied in many semiconductor FABs and proposed by international semiconductor associations such as SEMATECH and SELECT which develop efficient semiconductor production application for EES. Our EES solution is fully compliant with SEMI & SEMATECH’s standard specifications and Data Gathering is done through the SOA-based EDA (Equipment Data Acquisition) solution instead of former SECS/GEM/HSMS methods.
 
 
Equipment Engineering System
- Data Gathering using SECS/GEM/HSMS & EDA
- RMS (Recipe Management System)
- Parameter Management
- Equipment Health Monitoring
- Performance Measuring
- Maintenance Management
- Equipment SPC
- Alarm Management
- FDC (Fault Detection & Classification)
- APC (Advanced Parameter Control)
- Unscheduled Downtime Reduction
- Wafer to Wafer Process Matching
- Equipment to Equipment Matching
- NPW Management Reduction
 
 
Solution
Miracom provides a complete solution and service satisfying customer’s requirements by enabling an automated and systematic process starting from raw material income over production to shipment.Miracom is supporting and operating multi-year systems within the High-tech industry and has many consulting experts successfully executing corresponding projects in this field.
 
Glossary
- ERP: Enterprise Resource Planning
- SCM: Supply Chain Management
- CRM: Customer Relationship Management
- BPMS: Business Process Management System
- MES: Manufacturing Executing System
- YMS: Yield Management System
- EAP: Equipment Automation Process
- ICS: Inline Control System
- FDC: Fault Detection & Classification
- APC: Advanced Parameter Control
- RMS: Recipe Management System
- PMS: Preventive Maintenance System
- ARAMS: Automated Reliability Availability and Maintainability Standard System
- VM: Virtual Equipment
- PPM: Predictive / Preventive Maintenance
- RaP: Recipe and Parameter